Soft X-Ray Optics Laboratory
- Measurement of surface slope errors of large (up to 1.5 m length) optical components (mirrors, gratings, blanks)
- Measurement of surface topology (roughness) of optical components with 0.1 nm height resolution and 500 nm lateral resolution;
- Check of planarity of optical surfaces with λ/20 accuracy;
- Measurements of groove density and d-spacing variation on surface diffraction gratings with a precision (δd/d) better than 0.001%.
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