Seminars Archive
Sabina Bakula
Abstract
Monday, August 21, 2000, 14:30
Seminar Room, ground floor, Building "T"
Sincrotrone Trieste, Basovizza
I.D. required for external visitors
Improvement of the Adhesion Properties of the Polyimid Surface by Plasma
Treatment.
Sabina Bakula
(University of Ljubljana and Institute de Physique, Fribourg)
ABSTRACT
The problem of achieving a good adhesion between a polymer and a metal
surface has a very important role in microelectronic industry. Plasma treatment
of the surface is lately one of the most succesful techniques for improving
adhesion properties of the surface. Better adhesion is achieved by etching,
incorporation of new funcionalities into the surface and increasing roughness
of the surface caused by highly energetic plasma species. In this work
the polyimid-gold adhesion was studied. Polyimid was exposed to Ar, N2,
O2 and SO2 plasmas under different conditions. Chemical changes were observed
by XPS and changes in topography with AFM.
