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DEX02 Jenoptik Scanner

  • Fully automatic exposition procedure;

  • Scanning speeds: 1- 50 mm/s;

  • 4" mask & resist substrate (water cooled);

  • Set of 5 filters;

  • Horizontal and vertical apertures

  • Exposure area A =   54mm  x  84 mm

Last Updated on Friday, 09 August 2013 16:27