VENTING THE SPELEEM MAIN CHAMBER
- Put the beamline in safety conditions
- Check that the all valves are closed! It is important to close the CF 38 VAT valve on the beamline vacuum hose, so that mesh and photodiode can stay in static vacuum. Taking care of this saves a lot of outgassing after bakeout!
- Put the column in safety conditions
- Close the Viton valve separating MCH and column. Do not tighten hard!
- Switch off the channelplate and screen (firstly screen to 2kV, then MCP to 0, finally screen to 0)
- Slowly Turn the LaB6 current to 0
- Turn down the microscope high voltage (-18000 V to 0).
- Quit from UMeasure and CCBridge.
- Using LEEM2000 select soft shutdown and start in the tools menu. Then quit LEEM2000. All lenses will slowly have their current set to zero. Quit Uview.
- Switch off the HV power supply
- Set the Electron Analyser supplies (i.e Bias, sel+/-, ret lens, inner lens,
accel. lens) to zero and their control to local.
- Switch off the Lens Power supply
- Put the main chamber chamber (MCH) in safety conditions
- Switch off all filaments in the main chamber (ion gauges, evaporators, QMS, ion gun).
- Close tightly the VAT valve protecting the ion pump.
- Close the VAT valve separating the main chamber (MCH) from the large turbo must be closed.
- Put the prep chamber in safety conditions
- Check that the microscope foreline is pumped by the memabrane pump and by the small turbo (Varian V70).
- switch off all filaments: ion gun and ion gauge.
- close tight the VAT valve protecting the PCH ion pump.
- Open the VAT valve separating PCH and MCH.
- Open the air-lock valve.
- Stop primary pump and then the Varian V-70 (small turbo); vent with nitrogen. Monitor carefully the pressure in the column, as the valve MCH-COL can leak.
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