Welcome to DXRL @ Elettra
Deep X-ray lithography (DXRL) allows the production of high aspect ratio three dimensional structures in polymer with quasi perfect side-wall verticality and optical quality roughness. These structures can then be used as templates to mass-produce microparts made out of a large variety of metals, alloys or ceramics. The technique used to fabricate these parts is called LIGA. |
Research Highlights![]() Nanocrystal Film Patterning by Inhibiting Cation Exchange via Electron-Beam or X-ray Lithography
In this Letter we report patterning of colloidal nanocrystal films that combines direct e-beam (electron beam) writing with cation exchange. ![]() Exfoliated Graphene into Highly Ordered Mesoporous Titania Films: Highly Performing Nanocomposites from Integrated Processing
We have designed an integrated process to obtain mesoporous graphene nanocomposite films. ![]() Microfabrication of sharp blazed gratings by a two-step height amplification process based on soft and deep X-ray lithography
We describe a scheme for the fabrication of sharp blazed gratings involving two cascaded steps of X-ray lithography (XRL) with electroplating (EP) steps interposed.
012
![]() |