Specifications
Page 3 of 4
Spatial ResolutionFIB - patterned Au (10 nm) on Si
|
Energy Resolution
|
Technigue |
Pass Energy |
Slit width |
Analyser resolution |
|
Hg-Source |
50 |
1 |
400 |
|
micro-XPS/UPS |
100 |
1 |
395 |
|
micro-XPS/UPS |
100 |
0.5 |
200 |
|
micro-XPS/UPS |
50 | 1 | 195 |
|
micro-XPS/UPS |
50 |
0.5 |
100 |
|
micro-XPS/UPS |
25 |
1 |
100 |
Last Updated on Monday, 11 November 2019 16:18
