Elettra-Sincrotrone Trieste S.C.p.A. website uses session cookies which are required for users to navigate appropriately and safely. Session cookies created by the Elettra-Sincrotrone Trieste S.C.p.A. website navigation do not affect users' privacy during their browsing experience on our website, as they do not entail processing their personal identification data. Session cookies are not permanently stored and indeed are cancelled when the connection to the Elettra-Sincrotrone Trieste S.C.p.A. website is terminated.
More info

Beamline Description


LILIT beam line was designed in order to allow the selection of a wide spectral range continuously, from soft (1.0 keV) to hard (12 keV) X-Rays. This is achieved by combining high-pass filters (i.e. two Be windows) with low-pass filters (mirrors at controlles angles of incidence). The configurations devoted to deliver a soft X-ray spectrum (photon energy between 1 and 2 keV) are optimized to achieves the highest lithographic resolution. The beamline can provide also spectra in the hard X-ray region (photon energy higher than 10 keV) where sensitive materials of thickness of several tens of microns can be successfully exposed. The exposure consists in a continous scansion of the mask-sample assembly in front of the impinging X-ray beam; this is performed with a Scanner installed in a class 10 clean room, controlled by a remote software. After exposure, the lithographed sample is post-processed (post-exposure bake, if any, development and microscopical inspection) in the class 1000 adhiacent clean room.

The beamline consists of one plane mirror placed at 14m from the source and of a second toroidal mirror placed at 2 m from plane mirror. The total length of the beamline, calculated from the front-end port of the bending magnet, is 13.3 m. The angles under which the synchrotron radiation is collected have been fixed at 6 mrad and 0.83 mrad respectively in the horizontal and the vertical plane. The latter value corresponds to the natural divergence of the synchrotron radiation in the soft X-rays range under the standard operating condition of the beamline. A further selection down stream of the solid angle can be done by using adjustable slits. A second Beryllium window is located before plane mirror. Further adjustable slits for the beam shaping, and a photon shutter are placed after toroidal mirror close to the end of the beamline. 

Last Updated on Wednesday, 21 December 2011 12:45